产品概述 Product Overview

High-precision Differential Pumped Rotary Feedthrough has improved the precision and rigidity of compact differentially pumped rotary feedthrough by using high-precision crossed roller bearing.
The bearing can be mounted directly to rotary and stationary stages without any fixing plates and housing. As a result, it is possible to increase the thickness of the bearing or the size of the rolling elements in the bearing, while the feedthrough performance is almost entirely unaffected by the installation of the bearing. Thus, in the compact space it is allowed to install a precise optical encoder, which can provide position feedback together with a worm gear system driven by a servo motor, so the feedthrough can be controlled with extremely high precision. The larger ball bearings improve the rigidity of the UHV rotary drive.

规格说明 Specification

● Servo motor driver	● High-precision Crossed Roller Bearings	● Rotation range: ±175°
● Mounting flange on both sides: CF flange, tapped hole	● optical encoder, resolution: ≤0.0001°	● One stage differential pumping for UHV Performance

Flange OD

A

B

C

D

E

Weight（Kg)

Part Number

mm

inch

mm

inch

mm

inch

mm

inch

mm

inch

mm

inch

203

8

338

13.31

288

11.34

104

4.09

102

4.02

90

3.54

29.2

HDPRF150AP

产品尺寸 Dimension Drawing

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